About: http://webisa.webdatacommons.org/341175411

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Improved dielectric materials are materials having a low dielectric constant yet high enough elastic modulus to tolerate subsequent processing steps such as etching and CMP processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com