About: http://webisa.webdatacommons.org/346883207

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	___________________________As shown in Table 4, the magnitude of thinning (reduction) of the resist pattern was found extremely small, i.e. as small as 10 nm or less.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com