About: http://webisa.webdatacommons.org/34759780

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The metal mask step is followed by passivation, in which BPSG or other dielectric material is deposited on the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com