| http://www.w3.org/ns/prov#value | - e within one chamber, for example 50 a, from entering the paired adjacent chamber, for example 50 b. [0037] It should be noted that, when alternating sequences of monolayer species deposition is required, the robot can simply move wafers back and forth between the adjacent chambers, for example 50 a, 50 b, until a desired layer thickness on the wafer is obtained. [0038] It should also be noted tha
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