About: http://webisa.webdatacommons.org/352341242

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a case that an undesigned void or groove is exposed on the surface of the insulation film by the polishing in the CMP method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com