About: http://webisa.webdatacommons.org/35318110

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The device of claim 13, wherein;said plurality of lot include k lots of semiconductor substrates, where k is a positive integer larger than one; different sets of processing times Tj for j=1, 2, . . .
http://www.w3.org/ns/prov#wasQuotedFrom	google.es