About: http://webisa.webdatacommons.org/356871893

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, in the embodiments illustrated in FIG. 11A, the dielectric layer is formed as per act 1103 and openings such as via holes and/or trenches are etched into the dielectric layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk