About: http://webisa.webdatacommons.org/363756820

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	about 5% by volume or weight of the barrier CMP composition, for example, between about 0.5% and about 2% by volume or weight, such as about 1 wt. %.
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com