About: http://webisa.webdatacommons.org/36449590

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Ltd.Method and apparatus for fabricating metal layerUS7247223Apr 28, 2003Jul 24, 2007Semitool, Inc.Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpiecesUS7279079Jul 16, 2003Oct 9, 2007Dainippon Screen Mfg.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com