About: http://webisa.webdatacommons.org/366266971

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4B is a diagrammatic plan view of the tool array illustrated in FIG. 4A in accordance with one embodiment of the invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com