About: http://webisa.webdatacommons.org/367727480

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	That is, interlayer insulating layer 17, bit line 15 and interlayer insulating layer 11 may be etched in the same etching apparatus only by changing conditions such as the etching gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com