| http://www.w3.org/ns/prov#value | - For example, the gate insulating film 1019 can be formed using silicon oxide, silicon oxynitride, silicon nitride oxide, a film including carbon, which is typified by DLC (diamond like carbon), acrylic, epoxy, polyimide, polyamide, polyvinyl phenol, benzocyclobutene, or the like.
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