About: http://webisa.webdatacommons.org/371206695

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a simplified cut-away side view of an inductively coupled RF plasma reactor corresponding to a first embodiment of the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com