| http://www.w3.org/ns/prov#value | - FIG. 9A is a plan view of the orientation unit illustrating an appearance of the orientation that the ID mark is put by displacing from the normal position to the circumferential direction when the place table is turned to the corrected turn angle and FIG. 9B is a plan view of the orientation unit when the ID mark of the wafer is set in the OCR.
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