About: http://webisa.webdatacommons.org/374905821

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 13A is a plan view of a partially fabricated interferometric modulator using the fabrication process embodiment of FIGS. 11A and 11B.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr