About: http://webisa.webdatacommons.org/377919553

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A process such as spin coating can be used to deposit the photoresist layer 66.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com