About: http://webisa.webdatacommons.org/377998644

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	yer is removed, for example by etching the second dielectric material from the exposed portion of the second dielectric layer at a rate greater than that for etching the third dielectric material in the third patterned dielectric layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com