About: http://webisa.webdatacommons.org/37970947

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Photolithography consists of depositing a photoactive resist on the semiconductor device and exposing the resist through a mask such that portions of the mask are exposed to radiation, and other portions are not exposed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com