| http://www.w3.org/ns/prov#value | - BRIEF DESCRIPTION OF THE DRAWINGS [0021]FIGS. 1A and 1B are a cross sectional view illustrating a process of forming samples used by the experiments by the present inventors and a graph showing the impurity concentrations of samples. [0022]FIGS. 2A to 2D are a schematic diagram showing the structure of a lamp heating CVD system, a diagram showing a molecular formula of organic copper compound used
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