About: http://webisa.webdatacommons.org/382943534

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In step 18 (etching), a portion other than the developed resist image is removed by etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com