About: http://webisa.webdatacommons.org/384377321

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The semiconductor film is doped, without changing conditions such as the dose amount of total ions and the acceleration voltage.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com