| http://www.w3.org/ns/prov#value | - d to the silicon atom and R3 is a hydrogen or an alkyl group having from 1 to 5 carbon atoms and is a substituent to the cycloaliphatic ring and wherein n is 4, 5 or 6 when the cycloaliphatic ring is cyclobutyl, cyclopentyl or cyclohexyl, respectively, wherein R4 and R5 are the same or different and are each methyl, isopropyl, sec- or t-butyl, and wherein y is 1, 2 or 3, z is 0 or 1, y+z is 2 or 3
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