About: http://webisa.webdatacommons.org/386643927

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	First, the wafer is placed into a deposition chamber, and the chamber is prepared for deposition, e.g. by performing any necessary preliminary steps such as pumping the chamber down.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com