About: http://webisa.webdatacommons.org/386882508

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a graph which shows the effect of the silicon etch rate in micrometers per minute versus the percent of the chlorine specie in argon for various system pressure conditions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com