| http://www.w3.org/ns/prov#value | - urce/drain regions could be masked to allow only the unmasked portions of the source/drain regions to be silicided; the silicide could be formed prior to the doping of the source and drain regions; and any number of different materials could be used to form the silicide including Ti, W, Cr, Mo, Ta, Pt, Pd, Co or other silicide forming metal.
|
