About: http://webisa.webdatacommons.org/391550770

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A shower head 72, made of a material, such as quartz, which allows ultraviolet rays to pass through by 90% or more (substantially transparent), is arranged near the ceiling of the process chamber 24.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com