About: http://webisa.webdatacommons.org/398497816

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A simple, powerful technique for facilitating defect inspection in manufactured articles, especially articles used in or resulting from semiconductor fabrication.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com