| http://www.w3.org/ns/prov#value | - A method of forming a deposition on a substrate, including the steps of: depositing a first layer of a barrier material on the substrate, the first layer of the barrier material having properties of microcracking in a first direction under stress, and depositing a second layer of a barrier material on the first layer, the second layer of the barrier material having properties of microvoiding, unde
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