| http://www.w3.org/ns/prov#value | - A method of forming a deposition on a substrate, including the steps of: forming a groove in a substrate, the groove being defined by walls, depositing a first layer of a first material on the walls defining the groove, depositing a second layer of a gold titanium nitride on the layer of the first material, the gold titanium nitride having properties of microcracking in a first direction when subj
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