| http://www.w3.org/ns/prov#value | - This dishing is apt to occur when copper or aluminum, which is relatively soft, is used as the interconnection material. [0020] Erosion is a phenomenon where, as shown in FIG. 27, a portion having a high pattern density such as where interconnections with a width of 1.0 ??m are formed at a density of 50% in a range of for example 3000 ??m is excessively removed.
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