About: http://webisa.webdatacommons.org/403376661

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a silicon nitride layer including boron can be formed by a plasma CVD method using silane, ammonia, and diborane.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com