About: http://webisa.webdatacommons.org/404895044

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a reaction schematic of the passivation process for preventing the build up of deposition products on the internal surfaces of an ALD reaction chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com