About: http://webisa.webdatacommons.org/405999425

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The contact hole 20 is formed by removing a portion of the oxide layer 22 by, for example, etching or other suitable process means.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com