About: http://webisa.webdatacommons.org/406537386

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, what is desired is a method and an apparatus which allows a reticle to be efficiently shielded from a laser until it is appropriate for the pattern on the reticle to be projected onto the surface of a wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com