About: http://webisa.webdatacommons.org/406954113

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The anisotropic nature of dry etching is desirable, but it has the drawback of not being highly selective to different types of layers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com