About: http://webisa.webdatacommons.org/408094580

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Abbildungssystem f???r ein breites Ultraviolett-SpektrumDE19731291C2 *Jul 21, 1997Apr 6, 2000Kla Instr CorpKatadioptrisches Abbildungssystem f???r ein breites Ultraviolett-Spektrum und dessen VerwendungDE102008040819A1Jul 29, 2008Mar 26, 2009Carl Zeiss Smt AgMethod for manufacturing optical element, particularly lens for objective or for lighting system for projection illumination system of micro
http://www.w3.org/ns/prov#wasQuotedFrom	google.com