| http://www.w3.org/ns/prov#value | - b3, leading to an increased resistance value, since all of the strain resistive elements Sxa1-Sxa3, Sxb1-Sxb3, Sya1-Sya3, Syb1-Syb3 are disposed on the surface (upper layer) of the semiconductor substrate 20.FIGS. 13A and 13B explain a deformed state of strain resistive elements when a moment My is transmitted to the action portion, in which FIG. 13A is a plan view, and FIG. 13B is a cross-section
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