About: http://webisa.webdatacommons.org/408765876

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Substrate 101 can be, for example, a silicon substrate wafer, or other material such as a glass, polymer or a plastic.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com