About: http://webisa.webdatacommons.org/410061901

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The trenches may be in any direction including horizontal, vertical or crosswise as illustrated in FIG. 7B. All three designs achieve a reduction in stiction values.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de