About: http://webisa.webdatacommons.org/412117825

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gas inlet 16 a is connected through a gas supply pipe 15 a to a process gas supply mechanism 15 for supplying a process gas including a reactive gas for etching, and a diluting gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr