About: http://webisa.webdatacommons.org/412587717

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Materials used in MEMS fabrication, such as Si and SiO2, are an example where we use a template made of Si which is electro-oxidized to produce SiO2 or SiO catalyst.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es