About: http://webisa.webdatacommons.org/413036670

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Deposition of electronic thin film materials by plasma enhanced processes including chemical vapor deposition and sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	uvm.edu