About: http://webisa.webdatacommons.org/41532358

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment, portions other than the pattern are covered with reticle blinds other than the reticle blinds 8A and 8B at the boundaries of the end portions of the light exposure field EA in FIG. 4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au