| http://www.w3.org/ns/prov#value | - FIG. 3A, FIG. 3B and FIGS. 3C through 3G are a side view, a plan view and partly cross-sectional views of the optical paths of the detection systems H,L which are shown in FIG. 1 and are adapted to detect scattered light 12 from the foreign substance 13 on the sample 7.
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