About: http://webisa.webdatacommons.org/420089918

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Inside the chamber 31, upper and lower electrodes 32 and 33, which are in the form of disks, are arranged in parallel in such a manner as to face each other.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com