About: http://webisa.webdatacommons.org/421630251

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is also noted that corners 22 (FIG. 5) can be rounded by etching processes other than the anisotropic etch described above.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com