About: http://webisa.webdatacommons.org/422846794

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate is then ion implanted with a p-type dopant including boron or the like to form doped region 146 that is a source region and doped region 148 that is a drain region.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com