About: http://webisa.webdatacommons.org/427070844

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In a deposition process, such as PECVD, the energy provided by such charged particle bombardment may be utilized to further enhance the deposition rate or to enhance the deposition quality, as mentioned above.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com