About: http://webisa.webdatacommons.org/428732234

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	or susceptor 94 to deposit a film of the desired character, and with spent precursor vapor being exhausted from the CVD reactor in line 28, for recycle, treatment or other disposition thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr