About: http://webisa.webdatacommons.org/430338710

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a cross section of a sputtering system having an ovally shaped target and a second target is mounted on a centrally disposed insulator,
http://www.w3.org/ns/prov#wasQuotedFrom	google.com